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American Vacuum Society
Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features
Kun-Chieh Chien
Chih-Hao Chang
Dragan Djurdjanovic
J. Vac. Sci. Technol. B.2021.39:064003
aip.org
aip.org
iText 4.2.0 by 1T3XT2021-10-13T16:20:00-07:00
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