Research

Chemical routes to monolithic integration of crystalline oxides on Si and Ge (001) using atomic layer deposition

 

Nanomanufacturing Systems for Mobile Computing and Mobile Energy Technologies (NASCENT)

 

Chemical Vapor Deposition of Ru(P) amorphous ultrathin films for Cu interconnect applications

 

Fluorescent probe-based characterization of surface sites on oxides

 

Understanding and controlling selective atomic layer deposition of metals for applications on back end of line interconnects.

 

Functional Polymer Layers for Near Borehole Sensing 

 

Characterizing Transition Metal Oxide Heterostructures