Dual beam FIB/SEM system with EBL capabilities (Located in EER 0.756)
Thermo Scientific Scios 2 HiVac
-High quality TEM sample preparation with Sidewinder HT FIB, Easylift &AutoTEM
-High quality and throughput subsurface and 3D Characterization.
-High contrast UHR imaging with in-lense Trinity detection scheme
-User Guidance for common DualBEam activities
-Auto Slice and View 4 can is used for automated serial milling and imaging
-30Kev EBL system with NPGS
System characteristics
- Stage: 110 x110 mm with 65 mm z-travel, 360° rotation, -15° to 90° tilt
- Easy navigation: 6 megapixels Nav-Cam with 160 x105 mm field of view for on screen sample tracking
- Large multi-purpose sample holder: 6 X 1/2 inch stubs, 3 x 1/2 inch stubs pre-tilted at 45°, 1 horizontal row holder slot, 1 pre-tilted row holder slot and 1 clamp holder
- NICol SEM column with Shottky emitter source.
- Voltage: 200eV to 30 keV (20 eV landing with beam deceleration)
- Current: 1 pA to 400nA
- resolution: 0.8 nm at 30keV in STEM, 1 nm at 30 k eV (in lense detection),1.6 nm at 1 k eV (in lense detection)
- Ion column.
- Voltage: 500V to 30 kV
- Current: 1.5pA to -65 nA in 15 steps
- resolution: 3 nm
- Detectors:
- Everhart-Thornley secondary electron detector (SED)
- In-lens T1 and T2 detectors
- ICE detector for secondary electron and ion detection
- Retractable Directional Back Scatter detector
- Retractable STEM 3+ detector
- Micro Analysis detectors: 30 mm windowless EDS detector, WDS detector and EBSD
- Carbon and Platinum deposition both the SEM and FIB
- CryoCleaner and charge neutralizer
- CryoMat for sample cooling up to -60°C
- QuickLoader for sample transfer without breaking vacuum
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FIB:SEM access details
Access is available to the Thermo Scientific Scios 2 FIB:SEM
- Hourly fees
- Trained On-Campus UT Users: $55/h.
- Higher Ed/State Agencies: $82/h.
- Corporate Users: $137/h.
Facility User Education
To become a user of this instrument please contact Raluca Gearba to schedule a training session. Email: gearba@austin.utexas.edu
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Examples of results
