I use this Hood for photoresist spin coating.
refer to the official document: Photoresist Spin Coater – L10 (no Au)
1. check the seal ring of the wafer holder!
If there is no seal ring, the vacuum function doesn’t work well. And you cannot start up the spinner.
2. Clean wafer holder with wipe and IPA. This clean is to guarantee the wafer and the holder contact each other closely, which guarantees the vacuum works well twice.
3. Adjust the recipe of your spin coating.
- “recipe”
- “4”
- “step”
- “1”
- “speed”->enter the parameter you need
- “ramp”->enter the accelerator you need
- The speed and accelerator typically are referred to the instruction regarding the certain photoresist.
- “step terminate”->enter the time you want to last
- “step”
- “2”
- “speed”
- “ramp”
- “step terminate”
4. Load your wafer on the wafer holder.
5. “vacuum on”
- Check the vacuum by touching the edge of the wafer.
- Apply the photoresist to your wafer.
6. Tread “start” button using your foot.
- Now the spin coater is working.
7. “vacuum on”
8. Unload your wafer from the holder.