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UT Shield

, Filed Under: MEMS processing

Mask Aligner (EVG 620): Back-Side Alignment (BSA)

  1. Initializing
    1. “Ev620.exe” icon on the desktop
    2. “login”
      User: User
      Password: evg620
    3. select the recipe
    4. modify the parameters suitable for your process
      • process: bottom side
      • process mode: crosshair
    5. “run”
  2. loading mask
    1. Prompt “insert maskholder and press <continue>” shows up. Press “Continue”.
    2. Prompt”insert mask with load frame and press <continue> ” shows up. Press “Continue” without the mask.
    3. Prompt “move tray in” shows up. Move tray in.
    4. Use “x”, “y”, and “theta” micrometer knobs to make sure that the chuck is positioned in the center.
    5. Press “undo”.
    6. Repeat the same process above with the mask.
  3. Mask Alignment
    1. Prompt “adjust mask and press <continue>” shows up.
    2. Focus both sides of objectives using the joystick.
    3. Use the joystick to find out the align mask in both right and left windows.
    4. Adjust stage in only “theta direction” to make alignment in both directions parallel
      • Do not adjust the stage in “x” or “y” directions.
    5. Press “Continue”.
    6. Prompt “move tray out” shows up. Move the tray out.
    7. Prompt “remove load frame and press <continue>”. Remove frame and press “Continue”.
    8. prompt “move tray in” shows up. Move tray in without mask holders or substrates.
    9. Prompt “adjust microscope to mask and press <continue>” shows up.
    10. Focus align mask on the mask using the joystick.
    11. Press “Continue”.
    12. Prompt “adjust crosshair and press <continue>” shows up.
    13. Align green crosshair with the align mask on the mask. Press “Continue”.
    14. Prompt “move tray out” shows up. Move tray out.
  4. Substrate loading
    1. Prompt “insert substrate and press <continue>” shows up.
    2. load the substrate wafer to the chuck. Press “Continue”.
    3. check the wafer/chuck is even or not. If not, gently push it even.
    4. Prompt “move tray in” shows up. Move tray in.
  5. Substrate alignment
    1. Prompt “adjust substrate and press <continue>” shows up
    2. Align green crosshair with the align mask on the substrate using knobs.
    3. Press “Continue”
    4. Prompt “Hard contact press <continue> or <undo>”
    5. Press “Continue”.
    6. Exposure starts.
  6. Substrate unload
    1. Prompt “move tray out” shows up.
    2. Move the tray out.
    3. Unload your substrate.
  7. Mask unload
    1. Prompt “remove substrate and press <continue> or <exit>” shows up
      • if you want to load a new substrate, press “continue” and repeat the No.5 process.
      • if you want to stop and unload the mask, press “undo”.
    2. Prompt “insert load frame and move tray in” shows up.
    3. Insert load frame and move the tray in.
    4. Prompt “Move tray out – remove mask and load frame” shows up.
    5. Move tray out and remove your mask and load frame
    6. Prompt “end of process” shows up.
    7. Press “exit” and minimize the recipe display.
    8. Click “log out” and close the software.
  8. You can leave now 🙂