1.Login
- user: guest
- password: guest
2.Venting
- “stop”
- “vent”. Wait until time is less than 90 secs.
3.dummy wafer loading
- open the Load Lock and load the dummy wafer.
- don’t touch the wafer belt.
- “stop”
- “evacuate”
- Pirani guage will be decreased.
- Penning guage should be decreased until e-5
4.pre-cleaning step
- “process”
- “recipes”
- “load”
- “O2 chamber clean”
- left click “process step” and edit the “process time” to “60 min” or “30 min”
- “run”
- when the process is done, yellow warning message will come up then press “accept” button
5.dummy wafer unloading
- “stop”
- “vent”
- open the Load Lock and unload the dummy wafer.
6.Sample loading
- Mount your sample on the surface of the dummy wafer using tap or oil.
- Load the dummy wafer and your sample to the Load Lock again.
- “stop”
- “evacuate”. wait the penning guage until it reaches e-5.
7.recipe running
- “process”
- “recipes”
- “load”
- “run”
the plasma is working.
- When the recipe is done, the yellow alert shows again. ->”accept”
8.unload your sample
- “stop”
- “vent”
- take your sample out of the Load Lock.
- “stop”
- “evacurate”
now you are done and you can leave.