Regarding using, the biggest difference between Oxford 100 and Oxford 80 is the pump. The Oxford 100’s pump is not that well. Often the Penning gauge doesn’t display e-5. If the situation happens, just press “stop” and “evacuate” again.
1.Login
- user: guest
- password: guest
2.venting
- “stop”
- “vent”
3.pre-clean
- open “load lock”
- load dummy wafer
- “stop”
- “evacuate”
- Pirani guage will be decreased.
- If the Penning guage doesn’t display e-5, even though turbo pump is working well, then press “stop” and “evacuate” again.
- “process”
- “recipes”
- “load”
- “O2 chamber clean”
- edit the process step to 60 min or 30 min
- when the process is done, yellow massage comes up and then press “accept”.
4.venting
- “stop”
- “vent”
5.sample preparation
- use Fomblin oil or tape to solidify sampe wafer at the center of dummy wafer.
6.sample loading
- “stop”
- “evacuate”
7.recipe running
- “process”
- “recipes”
- “load”
- “run”
- when the process (recipe) is done, the yellow message comes up and then press “accept”.
8.sample unloading
- “stop”
- “vent”
- take your sample out of the Load Lock.
- If you use Fomblin oil to combine your sample and dummy wafer, you need to use acetone to separate them.
- after taking outside your sample, “stop”
- “evacuate”
you can leave 🙂