February 3, 2023, Filed Under: MEMS processingSam Zeloof’s Homemade chips 02/02/2023 I am really excited about the Homemade chips by Sam Zeloof. http://sam.zeloof.xyz/
August 5, 2021, Filed Under: MEMS processingAZ5214 Photolithography 1.AMI clean 2.HMDS Prime 3.Spin-coating 3000 rpm->30s 1.6 um thickness 4.Prebake 110 deg.C -> 50s 5.Exposure vaccum 20 um seperation pre vac: 10 sec, full vac: 30 sec, vac purge: 10 sec continous WEC 6.Development AZ400K : water = 1 (50 ml) : 4 (200 ml), 25 sec – 35… read more
July 15, 2021, Filed Under: MEMS processingOxford ICP RIE 100 Regarding using, the biggest difference between Oxford 100 and Oxford 80 is the pump. The Oxford 100’s pump is not that well. Often the Penning gauge doesn’t display e-5. If the situation happens, just press “stop” and “evacuate” again. 1.Login user: guest password: guest 2.venting “stop” “vent” 3.pre-clean open “load… read more
