“DHF Mounted DSE Standard” “DHF 4-inch DSE Standard”
MEMS processing
Use SiO2 as masks of DSE
When we need to use DSE/DRIE/Etcher ICP Deep Silicon PlasmaTherm Versaline, suggest using a hard mask instead of a soft mask. There are two reasons, I assume. The selectivity of soft mask is about 1:10, while the selectivity of hard mask is about 100:1. If we use soft masks, like… read more
Mask Aligner (EVG 620): Back-Side Alignment (BSA)
Initializing “Ev620.exe” icon on the desktop “login”User: UserPassword: evg620 select the recipe modify the parameters suitable for your process process: bottom side process mode: crosshair “run” loading mask Prompt “insert maskholder and press <continue>” shows up. Press “Continue”. Prompt”insert mask with load frame and press <continue> ” shows up. Press… read more