June 29, 2021, Filed Under: MEMS processingdifference between MA6 Aligner and EVG Aligner MA6 Aligner is easier to do alignment. EVG Aligner is able to do backside alignment.
June 28, 2021, Filed Under: MEMS processingEVG Aligner 620 please refer to the Youtube video. Energy intensity of MA6 is 7.5 mW/cm2 Energy intensity of EVG Aligner is generally 12mW/cm2
June 25, 2021, Filed Under: MEMS processingOxford RIE 80 1.login user: user password: user 2.pre-cleaning(If the chamber is already evacuated, we can directly run “O2 clean” recipe; If not, we neet to evacuate the chamber first.) “process” “recipes” “load” “Oxygen Plasma”->edit the processing time to 30 mins or 60 mins. “run” 3.sample loading place your sample on the wipe… read more
