MEMS processing

MA6 Aligner is easier to do alignment. EVG Aligner is able to do backside alignment.

1.login user: user password: user 2.pre-cleaning(If the chamber is already evacuated, we can directly run “O2 clean” recipe; If not, we neet to evacuate the chamber first.) “process” “recipes” “load” “Oxygen Plasma”->edit the processing time to 30 mins or 60 mins. “run” 3.sample loading place your sample on the wipe… read more