KJL Sputter is one of the methods to do Physical Vapor Deposition (PVD). To my knowledge, there are mainly two ways to do PVD in the cleanroom: evaporator and sputter. 2.Transferring sample 3.Initiate Plasma – pre-sputtering process (Ti) 4.Main sputtering process (Ti) 5.Pre-sputtering process (Pt) 6.main-sputtering process (Pt) 7.transferring sample… read more
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