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I use this Hood for photoresist spin coating. refer to the official document: Photoresist Spin Coater – L10 (no Au) 1. check the seal ring of the wafer holder! If there is no seal ring, the vacuum function doesn’t work well. And you cannot start up the spinner. 2. Clean… read more 

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This is a special positive photoresist, which may realize the image reversal (IR) function. All in all, it needs exposure and flood exposure. If there is only normal exposure, it functions as a negative photoresist.