UT Shield

Nanostructured Semiconductor Materials and Devices

Prof. Xiuling Li's Research Group at UT Austin

Patents

Patent Portfolio I: Metal-assisted chemical etching (MacEtch)

  1. Metal-assisted chemical etching porous silicon formation method (Application number: 09/662,682, issued 09/14/2004).  Inventors: Xiuling Li, Paul W. Bohn, Jonathan V. Sweedler
  2. Metal-assisted chemical etching to produce porous group III-V materials (Application number: 09/989,050, issued 07/13/2004). Inventors: Paul W. Bohn, Xiuling Li, Jonathan V. Sweedler, Ilesanmi Adesida
  3. Method of forming Nanoscale Three Dimensional Patterns in a Porous Material (Application number: 13/062,130, issued 07/16/2013). Inventors: Xiuling Li, David N. Ruzic, Ik Su Chun, Edmond K. C. Chow, Randolph E. Flauta
  4. Metal-assisted chemical etching to produce III-V semiconductor nanostructures (Application number: 13/833,462, issued 02/10/2015). Inventors: Xiuling Li, Matthew T. Dejarld, Parsian Mohseni, Jae Cheol Shin, Winston Chern
  5. Method of forming an array of high aspect ratio semiconductor nanostructures (Application number: 13/503,123, issued 03/17/2015). Inventors: Xiuling Li, Nicholas X. Fang, Placid M. Ferreira, Winston Chern, Ik Su Chun, Keng Hao Hsu
  6. Apparatus and Method for Magnetic-Field Guided Metal-Assisted Chemical Etching, (Application number 14/541,765, issued 7/11/2017). Inventors: Xiuling Li, Weidong Zhou, Wen Huang
  7. Self-anchored Catalyst Metal-assisted chemical Etching (Application number: 15/441,745, issued 07/30/2018). Inventors: Xiuling Li, Jeongdong Kim, Lingyu Kong, Munho Kim
  8. Catalyst-Assisted Chemical Etching with a Vapor-Phase Etchant (Application number: 15/712,498, issued 02/28/2019). Inventors: Xiuling Li and Jeongdong Kim
  9. Optoelectronic device including a buried metal grating for extraordinary optical transmission (EOT) (Application number: 15/200,345, issued 03/25/2019). Inventors: Xiuling Li, Daniel Wasserman, and Xiang Zhao
  10. Optoelectronic Device Having an Antireflective Surface (Application number: 16/034,774, U.S. Patent No. 10,741,705, issued 08/11/2020). Inventors: Xiuling Li, Munho Kim, Jeong Dong Kim
  11. Catalyst-Assisted Chemical Etching with a Vapor-Phase Etchant (Application number, 16/361,514 issued 05/2020). Inventors: Xiuling Li, Jeong Dong Kim, Dane J. Sievers, Lukas Janavicius  

Patent Portfolio II: Strain-induced self-rolled-up membranes (S-RUMs)

  1. Rolled-up transformer structure for a radio frequency integrated circuit (RFIC) (Application number: 14/051,208, issued 01/27/2015). Inventors: Xiuling Li, Wen Huang
  2. Rolled-up transmission line structure for a radio frequency integrated circuit (RFIC) (Application number: 14/051,192, issued 04/28/2015). Inventors: Xiuling Li, Wen Huang
  3. Rolled-up inductor structure for a radio frequency integrated circuit (RFIC) (Application number: 14/051,188, issued 12/29/2015). Inventors: Xiuling Li, Placid M. Ferreira, Wen Huang, Xin Yu
  4. Tubular Resonant Filter and Method of Making a Tubular Resonant Filter (Application number: 15/092,979, issued 06/19/2018). Inventors: Xiuling Li, Wen Huang, Moyang Li
  5. Rolled-up power inductor and array of rolled-up power inductors for on-chip applications (Application number: 15/704,262, issued 03/2019). Inventors: Xiuling Li and Wen Huang
  6. Helical antenna and method of modulating the performance of a wireless communications device (Application number: 15/408,893, issued 4/30/2019). Inventors: Xiuling Li, Wen Huang, and Paul J. Froeter
  7. Rolled-up magnetic component for on-chip applications and method of making a rolled-up magnetic component (Patent number: 11/031,456, issued 6/8/2021). Inventors: Xiuling Li, Wen Huang, J. Ni, G. Eden, Z. Ou, and Q. Chen
  8. On-Chip Nanoscale Storage System Using Chimeric DNA (Application number: 16/593,450, pending). Inventors: Olgica Milenkovic, Nagendra Athreya, Apratim Khandelwal, Jean-Pierre Leburton, Xiuling Li, Charles Schroeder, Kasra Tabatabaei, and Bo Li.
  9. Electroplating method for enhancing the performance of rolled-up passive components (Application number: 17/503,603, pending). Inventors: Xiuling Li, Apratim Khandelwal, and Zhendong Yang.

Portfolio III: Nanowires

  1. Method of fabricating a planar semiconductor nanowire (Patent number: 12/989,558, issued 08/19/2014). Inventors: Xiuling Li, Seth A. Fortuna
  2. Field effect transistor structure comprising a stack of vertically separated channel nanowires (Patent number: 13/896,537, issued 12/29/2015 and licensed to a major global semiconductor company). Inventors: Xiuling Li and Yi Song
  3. Method of Forming 3D Multi-stack Nanowire and Nanosheet High Electron Mobility Transistors (provisional patent 63/171,443 filed 04/06/2021). Inventors: Xiuling Li and Shaloo Rakheja.