Uncertainty quantification MEMS – Uncertainty Quantification: Alwan and N. R. Aluru, “Analysis of the effect of spatial uncertainties on the dynamic behavior of electrostatic microactuators”, Communications in Computational Physics, Vol. 20, No. 2, pp. 279-300, 2016. Alwan and N. R. Aluru, “Data-driven stochastic models for spatial uncertainties in micromechanical systems”, Journal of Micromechanics and Microengineering, Vol. 25, No. 11, Art. No. 115009, 2015.Alwan and N. R. Aluru, “A nonstationary covariance function model for spatial uncertainties in electrostatically actuated microsystems”, International Journal for Uncertainty Quantification, Vol. 5, No. 2, pp. 99-121, 2015. Alwan and N. R. Aluru, “Improved statistical models for limited datasets in uncertainty quantification using stochastic collocation”, Journal of Computational Physics, Vol. 255, pp. 521-539, 2013. P. Sumant, H. Wu, A. Cangellaris, and N. R. Aluru, “Reduced-order models of finite element approximations of electromagnetic devices exhibiting statistical variability”, IEEE Transactions on Antennas and Propagation, Vol. 60, No. 1, pp. 301-309, 2012. Alwan and N. R. Aluru, “Uncertainty quantification of MEMS using a data-dependent adaptive stochastic collocation method”, Computer Methods in Applied Mechanics and Engineering, Vol. 200, No. 45-46, pp. 3169-3182, 2011.N. Agarwal and N. R. Aluru, “Weighted Smolyak algorithm for solution of stochastic differential equations on non-uniform probability measures”, International Journal for Numerical Methods in Engineering, Vol. 85, No. 11, pp. 1365-1389, 2011. N. Agarwal and N. R. Aluru, “A data-driven stochastic collocation approach for uncertainty quantification in MEMS”, International Journal for Numerical Methods in Engineering, Vol. 83, No. 5, pp. 575-597, 2010.N. Agarwal and N. R. Aluru, “Stochastic analysis of electrostatic MEMS subjected to parameter variations”, Journal of Microelectromechanical Systems, Vol. 18, No. 6, pp. 1454-1468, 2009. N. Agarwal and N. R. Aluru, “A domain adaptive stochastic collocation approach for analysis of MEMS under uncertainties”, Journal of Computational Physics, Vol. 228, No. 20, pp. 7662-7688, 2009. N. Agarwal and N. R. Aluru, “Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS”, Computer Methods in Applied Mechanics and Engineering, Vol. 197, No. 43-44, pp. 3456-3471, 2008. N. Agarwal and N. R. Aluru, “A stochastic Lagrangian approach for geometrical uncertainties in electrostatics”, Journal of Computational Physics, Vol. 226, No. 1, pp. 156-179, 2007.