The Chang Group along with teams from UT Dallas (Prof. Julia Hsu, Prof. Kevin Brenner, Prof. Cormac Toher) and Johns Hopkins University (Prof. Howard Katz) have been co-awarded an NSF FuSe2 grant to develop indium based inorganic resists for extreme ultraviolet (EUV) lithography. The project aims to create innovative materials for next-generation semiconductor manufacturing, enabling smaller and more precise chip features. This research will contribute to advancing chip performance and energy efficiency, supporting the evolving demands of the semiconductor industry.

Read more: UT engineering faculty win money to advance semiconductor development

Vijay was announced as the winner of the EIPBN 2024 Best Student Presentation Award for his presentation on “Designing Broadband Dielectric Mirrors using 3D Periodic Nanolattices”. Congratulations, Vijay!

Chang Group attends the 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in La Jolla, CA. The group presented talks on EUV Colloidal Nanosphere Lithography by Saurav, Multilayer Nanolattices by Vijay and Anti-dust Nanostructures by Andrew. The group also presented posters on  Contrast Degradation in Phase Shift Lithography by Cody, Mechanical Testing of Sapphire Nanopillars by Mehmet, EUV Resist Characterization by Ethan, Microstructures Devices on Nanolattice Films by Nana and Fabrication of Sapphire Nanostructures using Ultrafast laser by Joshua. Congratulations everybody!

Dr. Chang has been appointed as Topical Editor of Applied Optics for topics specializing in micro/nanofabrication, lithography, nanophotonics, nanostructured materials, metrology and interferometry. Congratulations!

Jeffery’s collaborative work with Dr Franky So’s group at NC State University, titled “Hybrid Laser Cavity Design for Improved Photon Lifetime and Performance” was published in IEEE Photonics Technology Letters. Congratulations!

I-Te’s prior work on “Multilayer dielectric reflector using low-index nanolattices” was published in Optics Letters. Congratulations!

Vijay’s paper titled, “Precise control of the optical refractive index in nanolattices” was published in Optics Letters. Congratulations!

Congratulations to Dr. Chang for being honored with the “Best Faculty Mentor Award” at the Walker Department of Mechanical Engineering in 2023!

The Chang group has been awarded the NSF PFI grant titled “PFI-TT: Advanced Materials for Augmented/Virtual Reality (AR/VR) Applications.” The grant will support their research on the use of ultra-low refractive index nanolattice materials in AR/VR devices.

Jeffrey’s work on “In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy“ was published in the Journal of Vacuum Science and Technology B. Congratulations!

Vijay’s work on “Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices” was published in the Journal of Vacuum Science and Technology B. Congratulations!

Andrew’s work on “Identification of dust particles on a periodic nanostructured  substrate using scanning electron microscope imaging” was published in the Journal of Vacuum Science and Technology B and was selected as Editor’s Pick. Congratulations!

Briana’s work on “In situ metrology of direct-write laser ablation using optical emission spectroscopy”  was published in the Journal of Vacuum Science and Technology B. Congratulations!