Ethan Presents Work at GRC

Ethan presented a poster on “Development of Hyper-NA EUV Lithography System for Novel Photoresist Characterization” at the Global Research Collaboration (GRC) Annual Review, Celebration & Transition to SMART USA. Congratulations Ethan!

Chang Group @ EIPBN 2025

Chang Group attends the 68th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in Savannah, GA. The group presented talks on Multilayer Nanolattices by Vijay, Particle Charging on Nanostructures in SEM by Andrew, Fabrication of Sapphire Nanostructures using Ultrafast laser by Joshua, Resist Characterization at 30nm by Ethan, and Mechanical Testing of Silicon Nanopillars by Mehmet. The group also presented posters on Anti-dust Nanostructures by Daniela and Thin-Shell Periodic Nanopillars by Dokyung. Congratulations everybody!

Congratulations 2025 Graduates!

Congratulations to group members who are graduating! Saurav received his PhD in ME and will be joining Lockheed Martin in CA. Laurie received her MS in BME and will be joining Yotta. Nana and Ethan received their MS in ME and will be continuing their doctoral studies in the group (? more year!). Alanna received her BS in ME and will be joining Applied Materials, and Joshua received his BS in ME and will be going to Stanford for his PhD. Thank y’all for your contributions to nanofabrication. We will miss you!

Chang Group awarded NSF grant to develop indium based resists for EUV Lithography

The Chang Group along with teams from UT Dallas (Prof. Julia Hsu, Prof. Kevin Brenner, Prof. Cormac Toher) and Johns Hopkins University (Prof. Howard Katz) have been co-awarded an NSF FuSe2 grant to develop indium based inorganic resists for extreme ultraviolet (EUV) lithography. The project aims to create innovative materials for next-generation semiconductor manufacturing, enabling smaller and more precise chip features. This research will contribute to advancing chip performance and energy efficiency, supporting the evolving demands of the semiconductor industry.

Read more: UT engineering faculty win money to advance semiconductor development