Andrew’s work on “Nanoparticle Dispersion and Separation in Superhydrophilic Nanostructures” was published in the RSC Applied Interfaces. Congratulations!
Mehmet Presents Work and Receives Award at TechConnect World 2025
Mehmet presented his research on “Effect of Geometry and Material Properties on the Mechanical Properties of Nanopillar Arrays” and received a Student Abstract Award at the 2025 TechConnect World Innovation Conference. Congratulations Mehmet!
Ethan Presents Work at GRC
Ethan presented a poster on “Development of Hyper-NA EUV Lithography System for Novel Photoresist Characterization” at the Global Research Collaboration (GRC) Annual Review, Celebration & Transition to SMART USA. Congratulations Ethan!
Daniela and Andrew Receive Awards @ EIPBN 2025
Daniela was announced as the winner of the EIPBN 2025 Best Student Poster Award for her presentation on “Investigation of Electrostatic and Capillary Forces of Anti-Dust Nanostructures”, and Andrew was announced as the winner of the Most Bizarre Micrograph for his SEM image “Mirror in the Machine“. Congratulations to you both!
Chang Group @ EIPBN 2025
Chang Group attends the 68th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in Savannah, GA. The group presented talks on Multilayer Nanolattices by Vijay, Particle Charging on Nanostructures in SEM by Andrew, Fabrication of Sapphire Nanostructures using Ultrafast laser by Joshua, Resist Characterization at 30nm by Ethan, and Mechanical Testing of Silicon Nanopillars by Mehmet. The group also presented posters on Anti-dust Nanostructures by Daniela and Thin-Shell Periodic Nanopillars by Dokyung. Congratulations everybody!
Congratulations 2025 Graduates!




Congratulations to group members who are graduating! Saurav received his PhD in ME and will be joining Lockheed Martin in CA. Laurie received her MS in BME and will be joining Yotta. Nana and Ethan received their MS in ME and will be continuing their doctoral studies in the group (? more year!). Alanna received her BS in ME and will be joining Applied Materials, and Joshua received his BS in ME and will be going to Stanford for his PhD. Thank y’all for your contributions to nanofabrication. We will miss you!
Vijay Publishes Paper
Vijay’s work on “Designing optical anisotropy in low-index nanolattices” was published in the Optics Express. Congratulations!
Jeffery’s Paper Featured as Inside Front Cover Article
Jeffery’s paper has been featured as the inside front cover of Materials Horizons. Congratulations!
Saurav Receives Award
Saurav received 2nd Place at the ME Graduate Student Poster Competition for his research on “3D Nanopatterning using Colloidal EUV Lithography”. Congratulations!
Jeffery Publishes Paper
Jeffery’s journal paper “Scratch-resistant sapphire nanostructures with anti-glare, anti-fogging, and anti-dust properties” has been published in the journal Materials Horizons. You can also read about the research in a News article by the Cockrell School of Engineering at UT Austin. Congratulations!
Dr. Chang promoted to Full Professor at UT Austin
Dr. Chang was promoted to full professorship at the Walker Department of Mechanical Engineering at The University of Texas at Austin. Congratulations!
Nana Publishes Paper
Nana’s work on “Fabrication of microstructures on porous nanolattices” was published in the Journal of Vacuum Science and Technology B. Congratulations!
Joshua Publishes Paper
Joshua’s work on Fabrication of “Hierarchial Sapphire Nanostructures using Ultrafast Laser Induced Morphology Change” was published in the Nanotechnology. Congratulations!
Fall 2024 Group Gathering

Chang Group awarded NSF grant to develop indium based resists for EUV Lithography
The Chang Group along with teams from UT Dallas (Prof. Julia Hsu, Prof. Kevin Brenner, Prof. Cormac Toher) and Johns Hopkins University (Prof. Howard Katz) have been co-awarded an NSF FuSe2 grant to develop indium based inorganic resists for extreme ultraviolet (EUV) lithography. The project aims to create innovative materials for next-generation semiconductor manufacturing, enabling smaller and more precise chip features. This research will contribute to advancing chip performance and energy efficiency, supporting the evolving demands of the semiconductor industry.
Read more: UT engineering faculty win money to advance semiconductor development