Saurav received 2nd Place at the ME Graduate Student Poster Competition for his research on “3D Nanopatterning using Colloidal EUV Lithography”. Congratulations!
Jeffery Publishes Paper
Jeffery’s journal paper “Scratch-resistant sapphire nanostructures with anti-glare, anti-fogging, and anti-dust properties” has been published in the journal Materials Horizons. You can also read about the research in a News article by the Cockrell School of Engineering at UT Austin. Congratulations!
Dr. Chang promoted to Full Professor at UT Austin
Dr. Chang was promoted to full professorship at the Walker Department of Mechanical Engineering at The University of Texas at Austin. Congratulations!
Nana Publishes Paper
Nana’s work on “Fabrication of microstructures on porous nanolattices” was published in the Journal of Vacuum Science and Technology B. Congratulations!
Joshua Publishes Paper
Joshua’s work on Fabrication of “Hierarchial Sapphire Nanostructures using Ultrafast Laser Induced Morphology Change” was published in the Nanotechnology. Congratulations!
Fall 2024 Group Gathering

Chang Group awarded NSF grant to develop indium based resists for EUV Lithography
The Chang Group along with teams from UT Dallas (Prof. Julia Hsu, Prof. Kevin Brenner, Prof. Cormac Toher) and Johns Hopkins University (Prof. Howard Katz) have been co-awarded an NSF FuSe2 grant to develop indium based inorganic resists for extreme ultraviolet (EUV) lithography. The project aims to create innovative materials for next-generation semiconductor manufacturing, enabling smaller and more precise chip features. This research will contribute to advancing chip performance and energy efficiency, supporting the evolving demands of the semiconductor industry.
Read more: UT engineering faculty win money to advance semiconductor development
Vijay Awarded Best Student Presentation @EIPBN2024
Vijay was announced as the winner of the EIPBN 2024 Best Student Presentation Award for his presentation on “Designing Broadband Dielectric Mirrors using 3D Periodic Nanolattices”. Congratulations, Vijay!

Chang Group @ EIPBN 2024
Chang Group attends the 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in La Jolla, CA. The group presented talks on EUV Colloidal Nanosphere Lithography by Saurav, Multilayer Nanolattices by Vijay and Anti-dust Nanostructures by Andrew. The group also presented posters on Contrast Degradation in Phase Shift Lithography by Cody, Mechanical Testing of Sapphire Nanopillars by Mehmet, EUV Resist Characterization by Ethan, Microstructures Devices on Nanolattice Films by Nana and Fabrication of Sapphire Nanostructures using Ultrafast laser by Joshua. Congratulations everybody!

Jeffrey Defends PhD Thesis

Jeffrey has successfully defended his PhD thesis work on “Large Scale Multifunctional Bio-Inspired Nanostructures and Their Process Modeling Enabled by Optical Emission Spectroscopy”, co-advised by Dr. Dragan Djurdjanovic. Special thanks to Jeffrey’s Doctoral Committee members Dr. S. V. Sreenivasan, and Dr. Michael Baldea. Jeffrey will be joining Tokyo Electron in Austin, TX. Congratulations Dr. Chien!
Dr. Chang appointed as Topical Editor of Applied Optics
Dr. Chang has been appointed as Topical Editor of Applied Optics for topics specializing in micro/nanofabrication, lithography, nanophotonics, nanostructured materials, metrology and interferometry. Congratulations!
Jeffrey’s collaborative work gets published
Jeffery’s collaborative work with Dr Franky So’s group at NC State University, titled “Hybrid Laser Cavity Design for Improved Photon Lifetime and Performance” was published in IEEE Photonics Technology Letters. Congratulations!
I-Te’s prior work gets published
I-Te’s prior work on “Multilayer dielectric reflector using low-index nanolattices” was published in Optics Letters. Congratulations!
Vijay Publishes Paper
Vijay’s paper titled, “Precise control of the optical refractive index in nanolattices” was published in Optics Letters. Congratulations!
Dr. Chang Receives Award
Congratulations to Dr. Chang for being honored with the “Best Faculty Mentor Award” at the Walker Department of Mechanical Engineering in 2023!