Ethan’s paper “Photoresist characterization using a tabletop extreme ultraviolet source at 30 nm wavelength” published in the Journal of Vacuum Science & Technology B has been selected as the winner of the EIPBN 2025 Best Journal Paper Award. Congratulations!
Author Archives: Chih-Hao Chang
Congratulations 2026 Graduates!


Congratulations to group members who are graduating! Vijay received his PhD in ME and joined IBM. Richard received his BS in ME and will be going to Georgia Tech for his PhD and Jackie received her BS in ME and will be going to Northwestern University for her PhD. Thank y’all for your contributions to nanofabrication. We will miss you!
Saurav Publishes Paper
Saurav’s work on “Three-Dimensional Nanopatterning Using Extreme Ultraviolet Colloidal Talbot Lithography” has been published by the journal Nano Letters. Congratulations!
Daniela and Andrew Publishes Paper
Daniela and Andrew’s work on “Investigating the contributions of electrostatic and capillary effects in anti-dust nanostructures” has been published by the journal Nanotechnology. Congratulations!
Lab Members Recognized by NSF GRFP
Daniel and Joshua have been selected as recipients of the prestigious 2026 National Science Foundation (NSF) Graduate Research Fellowship Program (GRFP)! Daniel joined the lab in Fall 2025 and is currently pursuing his PhD. Joshua was an undergraduate researcher working in the lab for the past year and is now pursuing his PhD at Stanford. Richard, who has been an undergraduate researcher in the lab, received an Honorable Mention. Congratulations to all three!
Mehmet’s Paper Featured as Inside Front Cover Article
Mehmet’s paper has been featured as the inside front cover of Nanoscale. Congratulations!
Andrew Receives Award
Andrew received the Honorable Mention for the TechConnect World 2026 Student Best Abstract Award! Congratulations!
Mehmet Receives 2nd Place at the ME Graduate Poster Competition
Mehmet received 2nd Place at the ME Graduate Student Poster Competition for his research on “Mechanically Robust Antireflection Sapphire Surfaces via Nanopillar Arrays”. Congratulations!
Mehmet Publishes Paper
Mehmet’s work on “From resilience to scratch resistance: Engineering the deformation mechanisms of nanostructured surfaces” has been published by the journal Nanoscale. Congratulations!
Andrew’s Paper Featured by RSC
Andrew’s recent paper, “Nanoparticle Dispersion and Separation in Superhydrophilic Nanostructures,” has been featured on the RSC Applied Interfaces blog. The post highlights our work on how nanoparticles interact with engineered nanostructured surfaces during wicking and transport, and the potential impact of this research on separation, contamination control, and advanced surface design.
Thanks to the Royal Society of Chemistry for the feature and to everyone involved in the project. You can read the post here: Hear from our authors: Andrew Tunell and Chih-Hao Chang.

Andrew’s Paper Featured as Front Cover Article
Andrew’s paper has been featured as the front cover of Journal of Vacuum Science & Technology B. Congratulations!
Andrew Publishes Paper
Andrew’s work on “Investigation of electrostatic effects between charged particles and nanostructured surfaces” has been published by the Journal of Vacuum Science and Technology B. Congratulations!
Ethan Publishes Paper
Ethan’s work on “Photoresist characterization using a tabletop extreme ultraviolet source at 30 nm wavelength” has been published by the Journal of Vacuum Science and Technology B. The article was also accompanied by a featured article in AIP Scilight. Congratulations!
Andrew’s Paper Featured as Front Cover Article
Andrew’s paper has been featured as the front cover of RSC Applied Interfaces. Congratulations!
Fall 2025 Group Gathering & Welcome New Members!

Group gathering at Chi’s house for fall 2025 kick off dinner, celebrating Vijay’s PhD graduation, and to welcome our newest members Natalia and Daniel. Welcome to the group!


