Saurav’s paper has been featured as the cover of Nano Letters. Congratulations!

Chang Group attends the 69th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in Denver, CO. The group presented talks on Metallic 3D Lithography Using Self-Healing Bessel Beams by Zhichao, Metrology of Three-Dimensional Nanostructures using Scatterometry by Cody, Mechanically Robust Nanostructured Sapphire by Mehmet, and Hollow-Core Nanopillar Arrays by Dokyung. The group also presented posters on Periodic Nanopillar Structures on Polycrystalline Diamond by Dean, Fabrication of Waveguides on Porous Nanolattice Films by Nana, and High-Selectivity Ar/CF₄ RIE of Sapphire by Natalia. Congratulations everybody!

Ethan’s paper “Photoresist characterization using a tabletop extreme ultraviolet source at 30 nm wavelength” published in the Journal of Vacuum Science & Technology B has been selected as the winner of the EIPBN 2025 Best Journal Paper Award. Congratulations!

Congratulations to group members who are graduating! Vijay received his PhD in ME and joined IBM. Richard received his BS in ME and will be going to Georgia Tech for his PhD and Jackie received her BS in ME and will be going to Northwestern University for her PhD. Thank y’all for your contributions to nanofabrication. We will miss you!

Saurav’s work on “Three-Dimensional Nanopatterning Using Extreme Ultraviolet Colloidal Talbot Lithography” has been published by the journal Nano Letters. Congratulations!

Daniela and Andrew’s work on “Investigating the contributions of electrostatic and capillary effects in anti-dust nanostructures” has been published by the journal Nanotechnology. Congratulations!

Daniel and Joshua have been selected as recipients of the prestigious 2026 National Science Foundation (NSF) Graduate Research Fellowship Program (GRFP)! Daniel joined the lab in Fall 2025 and is currently pursuing his PhD. Joshua was an undergraduate researcher working in the lab for the past year and is now pursuing his PhD at Stanford. Richard, who has been an undergraduate researcher in the lab, received an Honorable Mention. Congratulations to all three!

Mehmet’s paper has been featured as the inside front cover of Nanoscale. Congratulations!

Andrew received the Honorable Mention for the TechConnect World 2026 Student Best Abstract Award! Congratulations!

Mehmet received 2nd Place at the ME Graduate Student Poster Competition for his research on “Mechanically Robust Antireflection Sapphire Surfaces via Nanopillar Arrays”. Congratulations!

Mehmet’s work on “From resilience to scratch resistance: Engineering the deformation mechanisms of nanostructured surfaces” has been published by the journal Nanoscale. Congratulations!

Andrew’s recent paper, “Nanoparticle Dispersion and Separation in Superhydrophilic Nanostructures,” has been featured on the RSC Applied Interfaces blog. The post highlights our work on how nanoparticles interact with engineered nanostructured surfaces during wicking and transport, and the potential impact of this research on separation, contamination control, and advanced surface design.

Thanks to the Royal Society of Chemistry for the feature and to everyone involved in the project. You can read the post here: Hear from our authors: Andrew Tunell and Chih-Hao Chang.

Andrew’s paper has been featured as the front cover of Journal of Vacuum Science & Technology B. Congratulations!

Andrew’s work on “Investigation of electrostatic effects between charged particles and nanostructured surfaces” has been published by the Journal of Vacuum Science and Technology B. Congratulations!

Ethan’s work on “Photoresist characterization using a tabletop extreme ultraviolet source at 30 nm wavelength” has been published by the Journal of Vacuum Science and Technology B. The article was also accompanied by a featured article in AIP Scilight. Congratulations!