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Ethan’s Paper Wins Best Journal Paper Award

Posted on 05/14/2026 by Chih-Hao Chang

Ethan’s paper “Photoresist characterization using a tabletop extreme ultraviolet source at 30 nm wavelength” published in the Journal of Vacuum Science & Technology B has been selected as the winner of the EIPBN 2025 Best Journal Paper Award. Congratulations!

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