Chang Group @ EIPBN 2026

Chang Group attends the 69th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) in Denver, CO. The group presented talks on Metallic 3D Lithography Using Self-Healing Bessel Beams by Zhichao, Metrology of Three-Dimensional Nanostructures using Scatterometry by Cody, Mechanically Robust Nanostructured Sapphire by Mehmet, and Hollow-Core Nanopillar Arrays by Dokyung. The group also presented posters on Periodic Nanopillar Structures on Polycrystalline Diamond by Dean, Fabrication of Waveguides on Porous Nanolattice Films by Nana, and High-Selectivity Ar/CF₄ RIE of Sapphire by Natalia. Congratulations everybody!